Facility


Name 
Atomic Later Deposition System

Model
SN13-20 of Sntek

Deposition material
Al2O3, TiO2, Pt,Y2O3

Application
Deposition


















Name 
Powder ALD

Model
Atomic shell of CN1

Deposition material
RuOx,pt,TiO2

Application
Coating on particle, wire, tube, etc


















Name 
Contact angle

Model
Smart drop Lab of Femtofab

Application
Contact angle measurement
Contact angle hysteresis measurement
Surface tension measurement
high-speed interface measurement
Solid surface Energy measurement
Multi drop simultaneous measurement


















Name 
4 point probe

Model
CMT-SR2000N of Ait

Application
Surface resistivity measurement

Name 
Ozone generator

Model
Atlas 30C of Absolute ozone

Application
Surface preparation
Precusor bubbling















































































All the equipment is in Laboratory 382 of Incheon University