Facility

Name 
Metal ALD

Model
IC-11

Deposition material
RuPt

Application
Deposition

Name 
Atomic Later Deposition System

Model
SN13-20 of Sntek

Deposition material
Al2O3, TiO2, Pt,Y2O3

Application
Deposition

















Name 
-

Model
-

Application
-

Name 
Powder ALD



Model

Atomic shell of CN1

Deposition material
RuOx,pt,TiO2

Application
Coating on particle, wire, tube, etc





















Name 
Contact angle

Model
Smart drop Lab of Femtofab

Application
Contact angle measurement
Contact angle hysteresis measurement
Surface tension measurement
high-speed interface measurement
Solid surface Energy measurement
Multi drop simultaneous measurement
























Name 
Natural Type Oven

Model
HQ-DO 84

Application
Drying laboratory equipment


Name 
4 point probe

Model
CMT-SR2000N of Ait

Application
Surface resistivity measurement



Name 
Ozone generator

Model
Atlas 30C of Absolute ozone

Application
Surface preparation
Precusor bubbling















































































Name 
SEM

Model
:

Application
Surface analysis

Name 
Probe Station

Model
LS system

Application
Evaluation of device characteristics
-threshold voltage, oxide charge
-on/off current,hysteresis curve
-capacitance, dielectric constant
- c-v curve, leakage current


Name 
BET

Model
:

Application
Measure surface area
Pore size distribution
Porosity measurement


All the equipment is in Laboratory 382 of Incheon University